Towards CNC automation in AFM probe-based nano machining
Date
2013-03-25Author
Brousseau, Emmanuel
Arnal, Benoit
Thiery, Stephane
Nyiri, Eric
Gibaru, Olivier
Mayor, J. Rhett
Publisher
8th International Conference on MicroManufacturing (ICOMM 2013)
Metadata
Show full item recordAbstract
This paper presents a feasibility study, which aims to demonstrate the applicability of the CNC automation philosophy for the process of AFM probe-based nano machining conducted on commercial AFM instruments. In particular, it is proposed to machine in this way nanostructures generated with any CAD software via the representation of tip path trajectories with G-code instructions. Such a representation can then be interpreted with a post processor at the interface of an AFM instrument. To demonstrate the validity of the proposed approach, it was implemented on a complex pattern. The results obtained open further research perspectives with respect to minimizing the sources of machining errors observed.
Subject
nanomanufacturing
automation
CAD/CAM
AFM probe-based machining
Permanent Link
http://digital.library.wisc.edu/1793/65292Citation
ICOMM 2013 No. 95
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